| Part Number |
C10178 Series  |
| Name of product |
Optical NanoGauge for macro measurement |
| Brief description |
Provides non-contact, real time measurement of thin film thickness from 20 nm to 50µm with fast and easy operation |
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Full description |
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The Optical NanoGauge is a film thickness measurement system utilizing spectral interferometry. Film thickness is recorded quickly and non-destructively by means of white light illumination. Spectral content of reflections from both thin film surface and substrate interface are analyzed by a curve fitting and FFT (fast Fourier transfer) technique. A photonic multichannel analyzer (PMA) is used as the detector to measure the spectral content with high sensitivity and high accuracy.
The macro series includes a wide variety such as the UV versions - compatible with thin film, and the NIR version - for samples with visible light absorption. |
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Features |
- High-speed and high-accuracy analysis
- Real-time measurement
- Data transfer with other equipment
- High resolution and high stability
- Optical non-contact measurement allows precise measurement without damage to samples.
- Multi-layer films can also be measured easily with newly developed software.
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| Related Products |
c8125-01 |
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Configuration
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