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Name of product
Laser Stimulation Microscope System


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 Datasheet:  1744 KB  
 
 
Key Specifications

Part Number µAmos
Name of product Laser Stimulation Microscope System
Brief description Laser stimulation system for short, void and current leakage localization
Full description
Hamamatsu's µAmos laser stimulation system offers the highest laser power delivery to DUTs and the greatest current change sensitivity available today. The µAmos leverages Hamamatsu's extensive infrared optical and low noise electronics design experience to provide a system optimized for both frontside and infrared backside imaging and laser stimulation. The µAmos can incorporate up to 3 laser wavelengths including 680nm, 1064nm, 1340nm to perform a range of techniques including OBIC, OBIRCH and many others. Its unique optical features includes a no compromise, independent optical path, large, infrared optimized 0.8X macro lens (15mm x 15mm FOV); Hamamatsu's 50X lens objective with NA=.76 offering higher resolution than some commercially available 100X lenses and optional Numerical Aperture Increasing Lens (NAIL) capability allowing IR resolution to 0.25um.
Features
  • 200mm or 300mm Frontside/Backside capability
  • Independent macro lens
  • Hamamatsu .76NA 50X lens
  • 3 wavelength support
  • Flexible scan patterns
  • Multi-vendor Prober Compatibility
  • Tester cable docking
  • High laser throughput
  • PicoAmp sensitivity
  • 10A amplifier option
  • NAIL lens option
  • Semi compliant
Applications
  • IDDQ failure analysis
  • Localization of:
    • Shorts
    • Voids
    • High resistive vias
    • Current leakage
  • Soft defect localization
Related Products Phemos Series@Optical MicroGauge, C8870@IC Polisher, C7103
Technical Note(s)
Technical Note: Dynamic Analysis by Laser Stimulation  (144KB)

(For download please click on the pdf-icon)
Notification Dark box illumination lamp Contains Mercury, Dispose According to Local, State or Federal Laws.
 


 
 
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