MEMS diffraction gratings

Hamamatsu TG and TM series spectrometers use holographic quartz glass transmission gratings manufactured with MEMS. Holography is an excellent technique for mass production. Diffraction grating fabrication occurs directly in the glass substrate, instead of fabricating a replica from the master grating. The quartz substrate improves signal throughput and eliminates the need for environmentally sensitive gels or organic epoxies. The resulting diffraction grating produces a precise spectrum with high diffraction efficiency and low noise.

TG series spectrometer

An in-line combination of lenses and transmission grating creates a small, high-performance spectrometer. Lenses are ideal to cover the entire NIR range (C11118GA, 900 nm to 2550 nm). The TG also works well in the UV and visible wavelength ranges, but over a narrower spectral range.

TM Series spectrometer

Mirrors are necessary to cover the UV to NIR regions in a single instrument. The TM series cover 200 to 800 nm and 320 to 1000 nm.

RC Series spectrometer

In-glass designs are very rugged and compact. The RC is about 1-inch cubed, small enough to make a handheld instrument with high performance.

MS Series spectrometer

 Our newer in-glass design. About 1/3 the size of the RC, the MS is small and light weight enough to be mounted as a scanning head. Designed exclusively for higher volume OEM applications, the MS uses photolithography techniques to create both a very small and highly consistent spectrometer at a low cost. The sensitivity variation between units is approximately 5%, much smaller than possible with conventionally aligned spectrometers